Method for imaging a feature using a scanning probe microscope

Procédé d'imagerie d'une caractéristique grâce à un microscope en champ proche

Abstract

Selon l'invention, l'utilisation d'une sonde à pilotage de potentiel local pilote un conducteur à un potentiel connu tandis que les lignes adjacentes sont mises à la terre par l'intermédiaire du corps de l'échantillon, ce qui réduit le signal de microscope à balayage électrostatique des lignes adjacentes, et ce qui permet l'imagerie de lignes métalliques plus profondément dans l'échantillon. Fournir des potentiels différents localement sur différentes lignes conductrices en utilisant de multiples sondes à pilotage de potentiel local permet de mettre en évidence différents conducteurs dans la même image, par exemple, en changeant la phase du signal appliqué aux différentes sondes à pilotage de potentiel local.
Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.

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